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7,367,138

Devices and methods for thermophoretic and electrophoretic reduction of particulate contamination on lithographic reticles

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Klarquist Sparkman LLP
One World Trade Center
121 S.W. Salmon Street
Suite 1600
Portland, Oregon 97204

503.595.5300
503.595.5301

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Klarquist is an intellectual property law firm based in Portland, OR specializing in patent prosecution, trademark and copyright management, and IP litigation. Founded in 1941, Klarquist is one of the oldest and largest full-service IP firms based on the West Coast.

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